Characterisation of Thin Films Using
ARXPS
Dr K Robinson
ARXPS is a technique, which traditionally
has been avoided due to the time penalty involved in recording
the data with the required S/N and the correct number of
angular measurements. These problems are compounded if large
samples have to be handled. This can be solved by the use
of automated stages, multiple analysers looking at the same
sample area or the use of a lens, which can alter the angle
without moving the sample. A more recent development is
the use of angular dispersive lens with an analyser where
the angular information can be retained and imposed on a
multi detector array. The Theta probe developed by VG does
have this facility and since it uses a multichannel plate,
96 angular measurements can be made simultaneously.
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ARXPS
data of SiOx
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Initial measurements on thin films of SiOx
on Si and SiOx/Si3N4/Si systems, indicate that the instrument
can be used to generate rapid ARXPS data. Similar measurements
can be made on difficult insulating samples, where the charge
compensation remains constant throughout the experiment.
This means that polymers can be rapidly analysed and the
surface segregation of different species can be determined.
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