A high energy beam (3-100keV) is directed at the sample surface at
a grazing angle. The electrons are diffracted by the crystal structure of the sample and
then impinge on a phosphor screen mounted opposite to the electron gun (compare with
LEED). The resulting pattern is a series of streaks. The distance
between the streaks being an indication of the surface lattice unit cell size. The grazing
incidence angle ensures surface specificity despite the high energy of the incident
electrons. If a surface is atomically flat, then sharp RHEED patterns are seen. If the
surface has a rougher surface, the RHEED pattern is more diffuse. This behaviour can lead
to 'RHEED oscillations' as a material is evaporated onto a surface. RHEED is therefore of
particular use with
MBE.