This technique enables images
of the elements in the near surface layer of conducting
samples to be acquired. SAM a combination of the
techniques of
SEM and
AES.
An electron beam is scanned over the surface and
the electrons excited from the surface are energy
analysed to detect Auger peaks. The intensity
of the Auger peaks as a function of the position
of the electron beam provides an image of the
element to which the Auger peak corresponds. As
for
AES, the near surface
layer typically means the first 2 or 3 atomic
layers of the surface.